"Tool capacity planning in semiconductor manufacturing."

Bülent Çatay, S. Selçuk Erengüç, Asoo J. Vakharia (2003)

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DOI: 10.1016/S0305-0548(02)00075-8

access: closed

type: Journal Article

metadata version: 2020-02-18

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Bülent Çatay, S. Selçuk Erengüç, Asoo J. Vakharia:
Tool capacity planning in semiconductor manufacturing. Comput. Oper. Res. 30(9): 1349-1366 (2003)

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