"Litho-AsymVnet: super-resolution lithography modeling with an asymmetric ..."

Qing Zhang et al. (2023)

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DOI: 10.1007/S11432-022-3755-Y

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type: Journal Article

metadata version: 2024-10-23

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Qing Zhang, Yuhang Zhang, Wei Lu, Huajie Huang, Zheng Zhong, Congshu Zhou, Yongfu Li:
Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture. Sci. China Inf. Sci. 66(12) (2023)

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