"Computational fluid dynamics modeling of a discrete feed atomic layer ..."

Matthew Tom et al. (2023)

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DOI: 10.1016/J.COMPCHEMENG.2023.108400

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type: Journal Article

metadata version: 2024-08-04

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Matthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides:
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. Comput. Chem. Eng. 178: 108400 (2023)

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