"Feedback control of surface roughness in sputtering processes using the ..."

Yiming Lou, Panagiotis D. Christofides (2005)

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DOI: 10.1016/J.COMPCHEMENG.2004.09.006

access: closed

type: Journal Article

metadata version: 2020-05-18

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Yiming Lou, Panagiotis D. Christofides:
Feedback control of surface roughness in sputtering processes using the stochastic Kuramoto-Sivashinsky equation. Comput. Chem. Eng. 29(4): 741-759 (2005)

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