"On the effect of self-sustained periodic flows on film thickness ..."

Michail E. Kavousanakis et al. (2022)

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DOI: 10.1016/J.COMPCHEMENG.2022.107775

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type: Journal Article

metadata version: 2022-06-13

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Michail E. Kavousanakis, Nikolaos Cheimarios, George Kokkoris, Andreas G. Boudouvis:
On the effect of self-sustained periodic flows on film thickness non-uniformity during CVD. Comput. Chem. Eng. 161: 107775 (2022)

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