"Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon ..."

Marquis Crose et al. (2018)

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DOI: 10.1016/J.COMPCHEMENG.2018.03.011

access: closed

type: Journal Article

metadata version: 2020-05-18

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Marquis Crose, Weiqi Zhang, Anh Tran, Panagiotis D. Christofides:
Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. Comput. Chem. Eng. 113: 184-195 (2018)

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