"A multiscale systems approach to microelectronic processes."

Richard D. Braatz et al. (2006)

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DOI: 10.1016/J.COMPCHEMENG.2006.05.022

access: closed

type: Journal Article

metadata version: 2020-05-18

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Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y. L. Jung, Rudiyanto Gunawan:
A multiscale systems approach to microelectronic processes. Comput. Chem. Eng. 30(10-12): 1643-1656 (2006)

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