"A novel optimization method to automated wet-etch station scheduling in ..."

Adrián M. Aguirre, Carlos A. Méndez, Pedro M. Castro (2011)

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DOI: 10.1016/J.COMPCHEMENG.2011.02.014

access: closed

type: Journal Article

metadata version: 2020-10-26

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Adrián M. Aguirre, Carlos A. Méndez, Pedro M. Castro:
A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems. Comput. Chem. Eng. 35(12): 2960-2972 (2011)

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