"Study on shop floor control system in semiconductor fabrication by ..."

Yeou-Ren Shiue, Ruey-Shiang Guh, Tsung-Yuan Tseng (2012)

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DOI: 10.1016/J.CIE.2012.01.004

access: closed

type: Journal Article

metadata version: 2020-09-05

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Yeou-Ren Shiue, Ruey-Shiang Guh, Tsung-Yuan Tseng:
Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller. Comput. Ind. Eng. 62(4): 1119-1129 (2012)

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