"DeepSEM-Net: Enhancing SEM defect analysis in semiconductor manufacturing ..."

Yibo Qiao et al. (2024)

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DOI: 10.1016/J.CIE.2024.110301

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type: Journal Article

metadata version: 2024-07-04

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Yibo Qiao, Zhouzhouzhou Mei, Yuening Luo, Yining Chen:
DeepSEM-Net: Enhancing SEM defect analysis in semiconductor manufacturing with a dual-branch CNN-Transformer architecture. Comput. Ind. Eng. 193: 110301 (2024)

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