"Multitask learning for virtual metrology in semiconductor manufacturing ..."

Chan Hee Park et al. (2018)

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DOI: 10.1016/J.CIE.2018.06.024

access: closed

type: Journal Article

metadata version: 2021-10-14

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Chan Hee Park, Younghoon Kim, Youngjoon Park, Seoung Bum Kim:
Multitask learning for virtual metrology in semiconductor manufacturing systems. Comput. Ind. Eng. 123: 209-219 (2018)

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