"A data-driven two-stage maintenance framework for degradation prediction ..."

Ming Luo et al. (2015)

> Home

Details and statistics

DOI: 10.1016/J.CIE.2015.04.008

access: closed

type: Journal Article

metadata version: 2020-02-20

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/candie/LuoYHZP15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/candie/LuoYHZP15
Ming Luo, Heng-Chao Yan, Bin Hu, Junhong Zhou, Chee Khiang Pang:
A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Comput. Ind. Eng. 85: 414-422 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.