"Long-term tool elimination planning for a wafer fab."

Shu-Hsing Chung, Ming-Hsiu Hsieh (2008)

> Home

Details and statistics

DOI: 10.1016/J.CIE.2007.09.009

access: closed

type: Journal Article

metadata version: 2020-02-20

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/candie/ChungH08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/candie/ChungH08
Shu-Hsing Chung, Ming-Hsiu Hsieh:
Long-term tool elimination planning for a wafer fab. Comput. Ind. Eng. 54(3): 589-601 (2008)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.