"Device photolithography: The electron beam pattern generator."

W. Samaroo et al. (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02514.X

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type: Journal Article

metadata version: 2020-03-03

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W. Samaroo, J. Raamot, P. Parry, G. Robertson:
Device photolithography: The electron beam pattern generator. Bell Syst. Tech. J. 49(9): 2077-2094 (1970)

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