"Device photolithography: Computer systems for pattern generator control."

Arthur G. Gross, J. Raamot, S. B. Watkins (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02508.X

access: closed

type: Journal Article

metadata version: 2020-03-03

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Arthur G. Gross, J. Raamot, S. B. Watkins:
Device photolithography: Computer systems for pattern generator control. Bell Syst. Tech. J. 49(9): 2011-2029 (1970)

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