"Layering processes and their applications in silicon microelectronics."

Pradip K. Roy, Sailesh M. Merchant, Arun K. Nanda (1997)

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DOI: 10.1002/BLTJ.2058

access: closed

type: Journal Article

metadata version: 2020-02-27

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Pradip K. Roy, Sailesh M. Merchant, Arun K. Nanda:
Layering processes and their applications in silicon microelectronics. Bell Labs Tech. J. 2(2): 234-245 (1997)

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