"An introduction to plasma etching for VLSI circuit technology."

Nace Layadi, Jennifer I. Colonell, John Tseng-Chung Lee (1999)

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DOI: 10.1002/BLTJ.2184

access: closed

type: Journal Article

metadata version: 2020-02-27

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Nace Layadi, Jennifer I. Colonell, John Tseng-Chung Lee:
An introduction to plasma etching for VLSI circuit technology. Bell Labs Tech. J. 4(3): 155-171 (1999)

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