"Capacitive MEMS microphones."

Gary Elko et al. (2005)

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DOI: 10.1002/BLTJ.20113

access: closed

type: Journal Article

metadata version: 2020-02-27

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Gary Elko, Flavio Pardo, Daniel López, David Bishop, Peter Gammel:
Capacitive MEMS microphones. Bell Labs Tech. J. 10(3): 187-198 (2005)

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