"Automatic control in microelectronics manufacturing: Practices, ..."

Thomas F. Edgar et al. (2000)

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DOI: 10.1016/S0005-1098(00)00084-4

access: closed

type: Journal Article

metadata version: 2020-02-20

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Thomas F. Edgar, Stephanie W. Butler, W. Jarrett Campbell, Carlos Pfeiffer, Christopher A. Bode, Sung Bo Hwang, K. S. Balakrishnan, Juergen Hahn:
Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. Autom. 36(11): 1567-1603 (2000)

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