"Adaptive control to a dry etch process by microcomputer."

H. Boehm (1982)

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DOI: 10.1016/0005-1098(82)90055-3

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type: Journal Article

metadata version: 2020-02-20

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H. Boehm:
Adaptive control to a dry etch process by microcomputer. Autom. 18(6): 665-673 (1982)

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