"Development of a method for attaching thin films to curved surfaces using ..."

Yuki Taoka et al. (2023)

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DOI: 10.1080/01691864.2023.2279603

access: open

type: Journal Article

metadata version: 2024-03-08

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Yuki Taoka, Terumichi Hayashi, Sanchuan Xu, Shigeki Saito:
Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure. Adv. Robotics 37(23): 1507-1519 (2023)

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