"Experimental study of a micro-rotor fabricated on a silicon wafer."

Terunobu Akiyama, Katsufusa Shono (1991)

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DOI: 10.1163/156855392X00141

access: closed

type: Journal Article

metadata version: 2020-04-25

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Terunobu Akiyama, Katsufusa Shono:
Experimental study of a micro-rotor fabricated on a silicon wafer. Adv. Robotics 6(3): 345-352 (1991)

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