"Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators."

Adnan Zaman et al. (2020)

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DOI: 10.1109/ACCESS.2020.3012520

access: open

type: Journal Article

metadata version: 2020-08-27

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Adnan Zaman, Abdulrahman Alsolami, Ivan F. Rivera, Jing Wang:
Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators. IEEE Access 8: 139266-139273 (2020)

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