"Design and Analysis of a New Excitation Structure for Magnetron Sputtering."

Ze-da Su et al. (2024)

> Home

Details and statistics

DOI: 10.1109/ACCESS.2024.3397923

access: open

type: Journal Article

metadata version: 2024-06-18

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/access/SuAALDQL24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/access/SuAALDQL24
Ze-da Su, Yuejun An, Hui An, Yanjun Lu, Wen-Yu Deng, Li-Jun Qi, Ming Li:
Design and Analysis of a New Excitation Structure for Magnetron Sputtering. IEEE Access 12: 70792-70809 (2024)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.