"Hierarchical Attention Module-Based Hotspot Detection in Wafer Fabrication ..."

Mobeen Shahroz et al. (2024)

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DOI: 10.1109/ACCESS.2024.3422616

access: open

type: Journal Article

metadata version: 2024-09-08

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Mobeen Shahroz, Mudasir Ali, Alishba Tahir, Henry Fabian-Gongora, Carlos Uc Rios, Md Abdus Samad, Imran Ashraf:
Hierarchical Attention Module-Based Hotspot Detection in Wafer Fabrication Using Convolutional Neural Network Model. IEEE Access 12: 92840-92855 (2024)

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