"Explainable Deep Learning System for Advanced Silicon and Silicon Carbide ..."

Riccardo Emanuele Sarpietro et al. (2022)

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DOI: 10.1109/ACCESS.2022.3204278

access: open

type: Journal Article

metadata version: 2024-02-05

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Riccardo Emanuele Sarpietro, Carmelo Pino, Salvatore Coffa, Angelo Alberto Messina, Simone Palazzo, Sebastiano Battiato, Concetto Spampinato, Francesco Rundo:
Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment. IEEE Access 10: 99102-99128 (2022)

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