"Effect of Wafer Tilt During Ion Implantation on the Performance of a ..."

Darpan Mishra, Ramesh Kumar Sonkar (2021)

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DOI: 10.1109/ACCESS.2021.3125446

access: open

type: Journal Article

metadata version: 2021-12-15

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Darpan Mishra, Ramesh Kumar Sonkar:
Effect of Wafer Tilt During Ion Implantation on the Performance of a Silicon Traveling-Wave Mach-Zehnder Modulator. IEEE Access 9: 149993-150003 (2021)

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