"Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster ..."

Yanjun Lu et al. (2021)

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DOI: 10.1109/ACCESS.2021.3077503

access: open

type: Journal Article

metadata version: 2024-10-06

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Yanjun Lu, Yan Qiao, ChunRong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu:
Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net. IEEE Access 9: 70868-70883 (2021)

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