"A Hybrid Eigenmode Restoration Algorithm for Computational Lithography ..."

Jia Liu et al. (2022)

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DOI: 10.1109/ACCESS.2022.3171042

access: open

type: Journal Article

metadata version: 2023-08-06

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Jia Liu, Qun Yu Xu, Min Su, Ning Fang, Bao Fa Wang:
A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle. IEEE Access 10: 45799-45810 (2022)

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