"Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices."

Jia Liu et al. (2020)

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DOI: 10.1109/ACCESS.2020.2985750

access: open

type: Journal Article

metadata version: 2020-05-22

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Jia Liu, Pinggang Jia, Jiashun Li, Fei Feng, Ting Liang, Wenyi Liu, Jijun Xiong:
Hydrophilic Direct Bonding of MgO/MgO for High-Temperature MEMS Devices. IEEE Access 8: 67242-67249 (2020)

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