"A Digital Twin Framework With Bayesian Optimization and Deep Learning for ..."

Chin-Yi Lin, Tzu-Liang Tseng, Tsung-Han Tsai (2025)

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DOI: 10.1109/ACCESS.2025.3551332

access: open

type: Journal Article

metadata version: 2025-04-08

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Chin-Yi Lin, Tzu-Liang Tseng, Tsung-Han Tsai:
A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control. IEEE Access 13: 50821-50837 (2025)

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