"Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite ..."

Shili Li et al. (2019)

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DOI: 10.1109/ACCESS.2019.2960797

access: open

type: Journal Article

metadata version: 2020-07-14

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Shili Li, Xuqiang Wu, Jinhui Shi, Qiang Ge, Gang Zhang, Benli Yu:
Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing. IEEE Access 7: 186510-186516 (2019)

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