"Linewidth Reconstruction Employing a Radial Basis Function Network in ..."

Hung-Fei Kuo, Muhamad Faisal, Shun-Feng Su (2016)

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DOI: 10.1109/ACCESS.2016.2616367

access: open

type: Journal Article

metadata version: 2018-07-04

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Hung-Fei Kuo, Muhamad Faisal, Shun-Feng Su:
Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry. IEEE Access 4: 6739-6748 (2016)

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