"Experimental Validation of Ultra-Precision Nanopositioning System."

Jaeyoung Kim et al. (2021)

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DOI: 10.1109/ACCESS.2021.3071769

access: open

type: Journal Article

metadata version: 2021-07-13

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Jaeyoung Kim, Dongwoo Kang, Kyung-Rok Kim, Hyunchang Kim:
Experimental Validation of Ultra-Precision Nanopositioning System. IEEE Access 9: 88931-88941 (2021)

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