"Wafer Edge Yield Prediction Using a Combined Long Short-Term Memory and ..."

Dasol Kim, Mintae Kim, Wooju Kim (2020)

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DOI: 10.1109/ACCESS.2020.3040426

access: open

type: Journal Article

metadata version: 2020-12-17

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Dasol Kim, Mintae Kim, Wooju Kim:
Wafer Edge Yield Prediction Using a Combined Long Short-Term Memory and Feed- Forward Neural Network Model for Semiconductor Manufacturing. IEEE Access 8: 215125-215132 (2020)

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