"Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm."

Wei-Ming Kan et al. (2019)

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DOI: 10.1109/ACCESS.2019.2926102

access: open

type: Journal Article

metadata version: 2019-08-08

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Wei-Ming Kan, Yu-Ru Huang, Chao-Yi Huang, Chun-Sheng Wu, Kao-Tun Chen, Yu-Shin Lin, Hung-Fei Kuo:
Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm. IEEE Access 7: 86064-86076 (2019)

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