"A Novel Optical Proximity Correction Machine Learning Model Using a ..."

Ching-Hsuan Huang et al. (2024)

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DOI: 10.1109/ACCESS.2024.3494816

access: open

type: Journal Article

metadata version: 2024-11-30

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Ching-Hsuan Huang, Han-Chun Tung, Yen-Wei Feng, Hung-Tse Hsu, Hsueh-Li Liu, Albert S. Lin, Peichen Yu:
A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention. IEEE Access 12: 165979-165991 (2024)

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