"Fuzzy Few-Shot Learning for Predictive Maintenance and Cost-Benefit ..."

Hao-Hsuan Huang, Yun-Hsun Huang (2024)

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DOI: 10.1109/ACCESS.2024.3405540

access: open

type: Journal Article

metadata version: 2024-06-18

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Hao-Hsuan Huang, Yun-Hsun Huang:
Fuzzy Few-Shot Learning for Predictive Maintenance and Cost-Benefit Analysis in Semiconductor Manufacturing: A Case Study on Photomask Haze. IEEE Access 12: 74607-74618 (2024)

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