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"Dynamic Modeling, Simulation, and Experimental Verification of a Wafer ..."
Yunbo He et al. (2019)
- Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen, Hui Tang:
Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control. IEEE Access 7: 47143-47153 (2019)
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