"Failure Detection and Primary Cause Identification of Multivariate Time ..."

Minjae Baek, Seoung Bum Kim (2023)

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DOI: 10.1109/ACCESS.2023.3281407

access: open

type: Journal Article

metadata version: 2023-06-15

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Minjae Baek, Seoung Bum Kim:
Failure Detection and Primary Cause Identification of Multivariate Time Series Data in Semiconductor Equipment. IEEE Access 11: 54363-54372 (2023)

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