"High-Precision Mapping and Analysis of Wafer-Scale Distortions in InP ..."

Salim Abdi et al. (2024)

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DOI: 10.1109/ACCESS.2024.3421283

access: open

type: Journal Article

metadata version: 2024-07-19

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Salim Abdi, Aleksandr Zozulia, Jeroen Bolk, E. J. Geluk, Kevin A. Williams, Yuqing Jiao:
High-Precision Mapping and Analysis of Wafer-Scale Distortions in InP Membranes to Si 3D Integration. IEEE Access 12: 92215-92226 (2024)

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