"Data publication: Modification of Porous Ultralow‑k Film by Vacuum ..."

Alexey I. Zotovich et al. (2023)

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DOI: 10.14278/RODARE.2076

access: open

type: Data or Artifact

metadata version: 2025-02-12

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Alexey I. Zotovich, Sergey M. Zyryanov, Dmitry V. Lopaev, Askar A. Rezvanov, Ahmed Gamal Attallah, Maciej Oskar Liedke, Maik Butterling, Maria A. Bogdanova, Alexey S. Vishnevskiy, Dmitry S. Seregin, Dmitry A. Vorotyntsev Vorotyntsev, Alexander P. Palov, Eric Hirschmann, Andreas Wagner, Sergej Naumov, Konstantin A. Vorotilov, Tatyana V. Rakhimova, Alexander T. R. Rakhimov, Mikhail Baklanov:
Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission. RODARE, 2023

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