"Monolithic Fabrication of Film Bulk Acoustic Resonators above Integrated ..."

Abhay Kochhar et al. (2022)

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DOI: 10.21227/H2GM18

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type: Data or Artifact

metadata version: 2024-11-07

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Abhay Kochhar, Takeshi Matsumura, Guoqiang Zhang, Ramesh K. Pokharel, Ken-ya Hashimoto, Masayoshi Esashi, Shuji Tanaka:
Monolithic Fabrication of Film Bulk Acoustic Resonators above Integrated Circuit by Adhesive- Bonding-Based Film Transfer. IEEE DataPort, 2022

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