"Heuristic based Scheduling System for Diffusion in Semiconductor ..."

Tanju Yurtsever, Erhan Kutanoglu, Jennifer Johns (2009)

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DOI: 10.1109/WSC.2009.5429171

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Tanju Yurtsever, Erhan Kutanoglu, Jennifer Johns:
Heuristic based Scheduling System for Diffusion in Semiconductor Manufacturing. WSC 2009: 1677-1685

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