"Optimization of AMHS design for a semiconductor foundry fab by using ..."

Jacky Tung et al. (2013)

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DOI: 10.1109/WSC.2013.6721742

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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Jacky Tung, Tina Sheen, Merlin Kao, C. H. Chen:
Optimization of AMHS design for a semiconductor foundry fab by using simulation modeling. WSC 2013: 3829-3839

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