"Embedded simulation for automation of material manipulators in a PVD ..."

Gerhard Rath, Jürgen M. Lackner, Wolfgang Waldhauser (2012)

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DOI: 10.1109/WSC.2012.6465050

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Gerhard Rath, Jürgen M. Lackner, Wolfgang Waldhauser:
Embedded simulation for automation of material manipulators in a PVD coating process. WSC 2012: 251:1-251:10

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