"Modeling methodology: new approaches for simulation of wafer fabrication: ..."

Chanettre Rasmidatta et al. (2002)

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DOI: 10.1109/WSC.2002.1166412

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Chanettre Rasmidatta, Shari Murray, John W. Fowler, Gerald T. Mackulak:
Modeling methodology: new approaches for simulation of wafer fabrication: the use of control variates and calibration metrics. WSC 2002: 1414-1422

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