"Implementation of response surface methodology using variance reduction ..."

Charles D. McAllister et al. (2001)

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DOI: 10.1109/WSC.2001.977438

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Charles D. McAllister, Bertan Altuntas, Matthew Frank, Juergen Potoradi:
Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing. WSC 2001: 1225-1230

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