"Learning-based release control of semiconductor wafer fabrication facilities."

Li Li et al. (2015)

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DOI: 10.1109/WSC.2015.7408400

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-20

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Li Li, Zhongbo Chen, Qingyun Yu, Nan Xiang:
Learning-based release control of semiconductor wafer fabrication facilities. WSC 2015: 2965-2973

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