"A sampling decision system for semiconductor manufacturing: relying on ..."

Daniel Kurz et al. (2014)

> Home

Details and statistics

DOI: 10.1109/WSC.2014.7020109

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

- view
  authority control:
- export record
  dblp key:
  - conf/wsc/KurzPSPL14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/wsc/KurzPSPL14
Daniel Kurz, Jürgen Pilz, Andrea Schirru, Simone Pampuri, Cristina De Luca:
A sampling decision system for semiconductor manufacturing: relying on virtual metrology and actual measurements. WSC 2014: 2649-2660

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.